The production system Tetra 2800 LF-PC with its 2800-litre chamber volume and PC control is mainly used in series production (cleaning, etching and activation):
Tetra 2800
| Switch cabinet | W 600 mm, H 1700 mm, D 800 mm |
| Chamber | ∅ 1200 mm, D 2500 mm |
| Chamber volume | approx. 2800 litres |
| Gas supply | 3 gas channels via MFCs |
| Generator |
1 piece (40 kHz) (optional: 13.56 MHz or 2.45 GHz) |
| Control | PC control (Windows) with industrial field bus |
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