Tetra 150

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Tetra 150 plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Tetra 150 plasma systems. Tetra 150 plasma systems are used primarily in the following areas:

  • Analytics (REM, TEM)
  • Archeology
  • Automotive
  • Research and development
  • Semiconductor technology
  • Small batch production
  • Electron microscopy
  • Precision technology
  • Biotechnology
  • Elastomer technology
  • Electronics
  • Plastics
  • Medical technology
  • Solar technology
  • Textiles
  • Micro-system technology
Spesification
Basic equipment

  • The housing size varies depending on the components/options

  • Chamber volumes: 150 litres, depending on the version

  • Power supply: 230 V or 400 V/3-phase

Gas Supply

  • Mass Flow Controllers (MFCs)

Vacuum Chambers

  • Stainless steel, rectangular, hinged door

    (approx. W 400 x H 600 mm x D 625 mm)

Loading Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
Electrodes

  • Single, or multiple levels

  • RIE electrodes with gas shower

Controls

  • PCCE control (Microsoft Windows CE)

  • PC control (Microsoft Windows POS Ready 2009)

Pressure measurement

  • Pirani

  • Baratron (for corrosive gas version)

Timer Digital
Generators Frequencies

  • 40 kHz: Power 0 - 1000 W; 0 - 1500 W; 0 - 2500 W

  • 13.56 MHz: Power 0 - 300 W; 0 - 600 W; 0 - 1000 W

  • 2.45 GHz: Power 0 - 1200 W


All generators are continuously adjustable from 0 - 100%
Vacuum Pumps In different sizes and from various manufacturers (as required with activated carbon filter)

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