The Bell Jar 35 plasma system is a research facility that has been developed for scientific experiments. The system is suitable for thermal evaporation, sputtering, electron beam evaporation, metallic coatings for SEM (Scanning Electron Microscope) sample preparation, as well as for classical plasma processes.
|Gas Supply||3 Mass Flow Controllers (MFCs)|
|Control||PC control (Microsoft Windows XPe)|
DC bias voltage source or unipolar pulsed
Power max. 300 W
Voltage max. 600 V DC
All generators are continuously adjustable from 0 - 100 %
|Vacuum pumps||In different sizes and from various manufacturers (as required with activated carbon filter)|