Bell Jar

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The Bell Jar 35 plasma system is a research facility that has been developed for scientific experiments. The system is suitable for thermal evaporation, sputtering, electron beam evaporation, metallic coatings for SEM (Scanning Electron Microscope) sample preparation, as well as for classical plasma processes.

Bell Jar
Basic Equipment

  • Housing approx. W 560 mm x H 1640 mm x D 620 mm

  • Chamber volume: approx. 35 litres

  • Power supply: 230 V/16 A

Gas Supply 3 Mass Flow Controllers (MFCs)
Vacuum Chambers

  • Glass Jar made of borosilicate glass

    (∅ 315 mm x H 500 mm)

Sputter Source

  • 1 sputter source 2" - 3" + shutter

    (with optional flue and gas inlet for reactive processes)

Substrate Holder

  • ∅ 140 mm (optional rotatable substrate heating, substrate cooling)

  • Switchable as an electrode for plasma pretreatment (cleaning, activating, etching)

Control PC control (Microsoft Windows XPe)
Pressure measurement Pirani
Generators Frequencies

  • 40 kHz: Power 0 - 500 W

  • 13.56 MHz: Power 0 - 300 W

DC bias voltage source or unipolar pulsed

Power max. 300 W

Voltage max. 600 V DC

All generators are continuously adjustable from 0 - 100 %
Vacuum pumps In different sizes and from various manufacturers (as required with activated carbon filter)
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