Nano

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Nano plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Nano plasma systems. Nano plasma systems are used primarily in the following areas:

  • Analytics
  • Archeology
  • Automotive
  • Research and Development departments
  • Semiconductor technology
  • Small batch production
  • Plastics
  • Medical technology
  • Micro-system technology
  • Sensors
  • Sterilization
  • Textiles
Spesification
Basic equipment

  • The housing size varies depending on the components/options

  • Chamber volumes: 18 - 36 litres, depending on the version

  • Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices

Gas Supply

  • Needle valve

  • Mass Flow Controllers (MFCs)

Vacuum Chambers

  • Stainless steel, round with lid

    (approx. ∅ 267 mm, L 420 mm or L 600 mm)


  • Stainless steel, rectangular, hinged door

    (approx. W 240 mm x D 420 mm or 600 mm)


  • Aluminium, round, with lid or hinged door

    (approx. ∅ 240 mm, L 400 mm or L 600 mm)


  • Quartz glass (UHP), round, with lid or hinged door

    (approx. ∅ 240 mm, L 400 mm or L 600 mm)


  • Borosilicate glass (UHP), round, with lid or hinged door

    (approx.∅ 240 mm, L 400 mm or L 600 mm)


Loading Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
Electrodes

  • Single, or multiple levels

  • RIE

Controls

  • Semi-automatic

  • PCCE control (Microsoft Windows CE)

  • PC control (Microsoft Windows POS Ready 2009)

Pressure measurement

  • Pirani

  • Baratron (for corrosive gas version)

Timer Digital
Generators Frequencies

  • 40 kHz: Power 0 - 300 W; 0 - 1000 W

  • 13.56 MHz: Power 0 - 100 W; 0 - 300 W

  • 2.45 GHz: Power 0 - 600 W;


All generators are continuously adjustable from 0 - 100%
Vacuum Pumps In different sizes and from various manufacturers (with active carbon filter, if required)

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