Femto

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Femto plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Femto plasma systems. Femto plasma systems are used primarily in the following areas:

  • Analytics
  • Archeology
  • Automotive
  • Research and Development departments
  • Semiconductor technology
  • Small batch production
  • Plastics
  • Medical technology
  • Micro-system technology
  • Sensors
  • Sterilization
  • Textiles
Femto Spesification
Basic equipment

  • The housing size varies depending on the components/options

  • Chamber volumes: 1.9 - 6 litres, depending on the version

  • Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices

Gas Supply

  • Needle valve

  • Mass Flow Controllers (MFCs)

Vacuum Chambers

  • Stainless steel, round with lid

    (approx. ∅ 100 mm, L 278 mm or L 600 mm)


  • Stainless steel, rectangular, hinged door

    (approx. W 103 x D 285 x H 103)


  • Aluminium, round, with lid or hinged door

    (approx. ∅ 95 mm, L 280 mm or L 600 mm)


  • Quartz glass (UHP), round, with lid or hinged door

    (approx. ∅ 95 mm, L 280 mm or L 600 mm)


  • Borosilicate glass (UHP), round, with lid or hinged door

    (approx. ∅ 95 mm, L 280 mm or L 600 mm)


Loading Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
Electrodes

  • Single, or multiple levels

  • RIE

Controls

  • Semi-automatic

  • PCCE control (Microsoft Windows CE)

  • PC control (Microsoft Windows POS Ready 2009)

Pressure measurement

  • Pirani

  • Baratron (for corrosive gas version)

Timer Digital
Generators Frequencies

  • 40 kHz: Power 0 - 100 W; 0 - 1000 W

  • 13.56 MHz; Power 0 - 50 W; 0 - 300 W

  • 12.45 GHz: Power 0 - 100 W; 0 - 300 W


All generators are continuously adjustable from 0 - 100%
Vacuum Pumps In different sizes and from various manufacturers (as required with activated carbon filter)

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