Yocto

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The Yocto III unit ist mainly used for the following applications:

  • Activation
  • Cleaning

Control:

  • Generator for plasma generation
  • 2 step switch
  • Start button
  • Power switch

Vacuum Pump

  • Dry vacuum pump (without oil)
  • Integrated into the system
  • Suction power: 0,75 m3/h

Gas Supply:

  • One process gas through filter
  • Flow through valve (not adjustable)
  • Ventilation through filter

Vacuum Chamber

  • Borosilicate glass (UHP) round with lid (approx. ∅ 50 mm, L 150 mm)
Basic Equipment
Power Supply 230 V / 50 - 60 Hz
Supply unit Yocto
Width 562 mm
Height 211 mm
Diameter 420 mm
Weight 20 kg
Generator Yocto
Frequency 100 kHz
Power 0 - 30 W
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