Special Plasma System Tetra 130-LF-PC

Give us a call and we will be happy to advise you.

We build Plasma systems specifically for your needs. The systems are designed according to the following criteria:

  • The expected material throughput
  • Size of the parts to be treated
Chamber W 400 mm, H 400 mm, D 810 mm
Chamber Volume approx. 130 litres
Gas Supply 3 gas channels via MFCs (of which 1x via Bubbler) 1 gas channel Monomer via 2/2-way valve

  • 1 piece (13.56 MHz)

  • (optional: 40 kHz)

Controls PC Control (Windows) with industrial field bus
Switch Cabinet W 1800 mm, H 2100 mm, D 1300 mm
Properties UHV range with turbo pump
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