Femto

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Femto plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Femto plasma systems. Femto plasma systems are used primarily in the following areas:

Analytics
Archeology
Automotive
Research and Development departments
Semiconductor technology
Small batch production

Plastics
Medical technology
Micro-system technology
Sensors
Sterilization
Textiles

Femto Spesification

Basic equipment	The housing size varies depending on the components/options Chamber volumes: 1.9 - 6 litres, depending on the version Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices
Gas Supply	Needle valve Mass Flow Controllers (MFCs)
Vacuum Chambers	Stainless steel, round with lid (approx. ∅ 100 mm, L 278 mm or L 600 mm) Stainless steel, rectangular, hinged door (approx. W 103 x D 285 x H 103) Aluminium, round, with lid or hinged door (approx. ∅ 95 mm, L 280 mm or L 600 mm) Quartz glass (UHP), round, with lid or hinged door (approx. ∅ 95 mm, L 280 mm or L 600 mm) Borosilicate glass (UHP), round, with lid or hinged door (approx. ∅ 95 mm, L 280 mm or L 600 mm)
Loading	Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
Electrodes	Single, or multiple levels RIE
Controls	Semi-automatic PCCE control (Microsoft Windows CE) PC control (Microsoft Windows POS Ready 2009)
Pressure measurement	Pirani Baratron (for corrosive gas version)
Timer	Digital
Generators	Frequencies 40 kHz: Power 0 - 100 W; 0 - 1000 W 13.56 MHz; Power 0 - 50 W; 0 - 300 W 12.45 GHz: Power 0 - 100 W; 0 - 300 W All generators are continuously adjustable from 0 - 100%
Vacuum Pumps	In different sizes and from various manufacturers (as required with activated carbon filter)

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