Atto

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The 10.5-litre LOW COST ATTO PLASMA LABORATORY UNIT, with manual, PC and PCCE control, is mainly used in the following areas:

  • Small batch production
  • Analytics (REM, TEM)
  • Medical technology
  • Sterilization
  • Research and Development departments
  • Archeology
  • Textiles
  • Plastics
Atto plasma cleaner with manual control
Housing W 425 mm, H 275 mm, D 450 mm
Chamber made of glass, ∅ 211 mm, L 300 mm
Chamber Volume approx. 10.5 litres
Gas supply 2 gas channels via needle valves
Generator 40 kHz/200 W or 13.56 MHz/50 W fixed matching
Vacuum Pump Suction power: 2 m3/h
Parts holding 1 piece product carrier:
Control Manual, process time via analogue timer
Atto Plasma Cleaner with integrated PCCE control
Housing W 525 mm, H 275 mm, D 450 mm
Chamber made of glass, ∅ 211 mm, L 300 mm
Chamber Volume approx. 10.5 litres
Gas supply 2 gas channels via MFCs
Generator 40 kHz/200 W or 13.56 MHz/50 W fixed matching
Vacuum Pump Suction power: 2 m3/h
Parts Holding 1 piece product carrier:
Control PC control (Microsoft Windows CE)
Atto Plasma Cleaner with integrated PC control
Housing W 525 mm, H 275 mm, D 450 mm
Chamber made of glass, ∅ 211 mm, L 300 mm
Chamber volume approx. 10.5 litres
Gas supply 2 gas channels via MFCs
Generator 40 kHz/200 W or 13.56 MHz/50 W fixed matching
Vacuum pump Suction power: 2 m3/h
Parts holding 1 piece product carrier:
Control PC control (Microsoft Windows XP)
Atto Plasma Cleaner with external PC control
Housing W 525 mm, H 275 mm, D 450 mm
Chamber made of glass, ∅ 211 mm, L 300 mm
Chamber Volume approx. 10.5 litres
Gas supply 2 gas channels via MFCs
Generator 40 kHz/200 W or 13.56 MHz/50 W fixed matching
Vacuum Pump Suction power: 2 m3/h
Parts Holding 1 piece product carrier:
Control PC control (Microsoft Windows XP)

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