ID
Options and accesories for plasma systems
2.45GHz Generator (Microwave)
The power ranges from 0 to 850 watts, the generator has a PC interface. Main areas of application are activation, cleaning, etching, semiconductor (front-end), semiconductor (back-end), plasma polymerization.
13.56 MHz generator
The power ranges from 0 to 850 watts, the generator has a PC interface. Main areas of application are activation, cleaning, etching, semiconductor (front-end), semiconductor (back-end), plasma polymerization.
40 kHz generator
The power ranges from 0 to 850 watts, the generator has a PC interface. Main areas of application are activation, cleaning, etching, semiconductor (front-end), semiconductor (back-end), plasma polymerization.
2/2 way valve for liquid dosage
Valve for the targeted dosage of monomers.
Activated carbon filter
The activated carbon filter can be easily changed.
Suction filter for vacuum
Protects the vacuum pump from projected parts, coating and contamination.
Automatic Door
A door that closes automatically at process start.
Barcode Reader
Protects the vacuum pump from projected parts, coating and contamination.
Heatable chamber
The chamber can be heated to approx. 80 �C. The temperature can be regulated. It is for defined process conditions and higher etching rates.
Bias voltage measurement
Bias voltage measurement
The bias voltage measurement is a measurement device and is available for kHz and MHz generators.
Bubbler bottle
The bubbler bottle belongs to polymerization accessories and is required for the connection of liquid monomers to the vacuum chamber. A carrier gas is employed instead of the simple monomer bottle. The carrier gas, e.g. Argon, is flushed through the monomer.
Butterfly Valve
A butterfly valve is used for controlling a gas flow in vacuum technology, especially in the suction line of a vacuum pump. To this end, the flow resistance in the line is varied by adjusting a flap which can close the conduit to varying degrees.
Documentation in the national language
The documentation is created according to Machinery Directive 89/392/EEC. This does not apply for German and English languages. The documentation is not automatically included with the system and must be ordered separately.
Rotary drum
Product carrier for use with bulk materials.
Pressure gauges
Pirani sensor or Baratron – display of the pressure in the vacuum chamber.
Pressure reducer
The pressure reducer is to be connected to the gas bottle – 200 bar. Different gases need different pressure reducers. So there is one for noble gases H2, O2, CF4, C4F8 and one for NH3.
